Micromachinining with Tailored Pulse Parameters

Hans Herfurth; Tim Lauterborn; Stefan Heinemann; Henrikki Pantsar

doi:10.1364/PHAST.2007.PThC3

Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
OSA Technical Digest (CD) (Optica Publishing Group, 2007),
paper PThC3
•https://doi.org/10.1364/PHAST.2007.PThC3

Micromachinining with Tailored Pulse Parameters

Hans Herfurth, Tim Lauterborn, Stefan Heinemann, and Henrikki Pantsar

Photonic Applications Systems Technologies Conference 2007

Baltimore, Maryland United States
ISBN: 1557528349

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Emerging Applications and Technologies (PThC)

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H. Herfurth, T. Lauterborn, S. Heinemann, and H. Pantsar, "Micromachinining with Tailored Pulse Parameters," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optica Publishing Group, 2007), paper PThC3.

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Abstract

Experiments on different metals and silicon were conducted to optimize removal rate or surface finish with nanosecond pulses of different parameters. A special fiber laser allows independent adjustment of pulse parameters while keeping beamquality constant.

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