Challenges in nanoscale patterning- Interfering with interference and possible applications in semiconductor and energy sectors

Murukeshan Vadakke Matham

doi:10.1364/PHOTONICS.2012.M3B.1

International Conference on Fibre Optics and Photonics
OSA Technical Digest (online) (Optica Publishing Group, 2012),
paper M3B.1
•https://doi.org/10.1364/PHOTONICS.2012.M3B.1

Challenges in nanoscale patterning- Interfering with interference and possible applications in semiconductor and energy sectors

Murukeshan Vadakke Matham

International Conference on Fibre Optics and Photonics 2012

Chennai India
9–12 December 2012
ISBN:

From the session
Plasmonics I (M3B)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
M. V. Matham, "Challenges in nanoscale patterning- Interfering with interference and possible applications in semiconductor and energy sectors," in International Conference on Fibre Optics and Photonics, OSA Technical Digest (online) (Optica Publishing Group, 2012), paper M3B.1.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

This invited paper covers the challenges in nanoscale patterning by giving an overview of the different optical concepts and approaches developed by the authors group focusing on conventional and near filed optics interference.

PDF Article

More Like This

Photonic Sensing Technology in the Energy Sector

Alexis Mendez
LS3B.1 Latin America Optics and Photonics Conference (LAOP) 2012

Pattern-Integrated Interference Lithography Demonstration

Guy M. Burrow, Matthieu C. R. Leibovici, and Thomas K. Gaylord
FW1F.4 Frontiers in Optics (FiO) 2012

New Trends and Challenges in Optical Digital Transmission Systems

C. Schubert, J. K. Fischer, C. Schmidt-Langhorst, R. Elschner, L. Molle, M. Nölle, and T. Richter
We.1.C.1 European Conference and Exhibition on Optical Communication (ECOC) 2012

Previous Article Next Article