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Conferences > Photonics > 2016 > P1A > P1A.23

Effect of etching solution on femtosecond laser assisted microchannel fabrication in glass

Amar Ghar, Sanyogita, and P K Panigrahi

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Abstract

Femtosecond laser micromachining has been used to fabricate 3D microchannels inside quartz glass using water and 15% concentrated HF acid etchant solution. Influence of laser parameters i.e. pulse energy and scan speed have been investigated.

© 2016 Optical Society of America

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