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Micro Nano Machining Processes of Glass Ceramic Zerodur: A Short Communication

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Abstract

In this context a study of various machining processes of glass ceramic zerodur is briefly reviewed. The various machining processes are atmospheric pressure plasma jet chemical process, grinding process, process processes and ion beam machining processes are used to obtained nanometeric surface roughness on zerodur glass ceramic material

© 2016 Optical Society of America

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