Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > QELS > 1997 > QWC > QWC4
  • Quantum Electronics and Laser Science Conference
  • OSA Technical Digest (Optica Publishing Group, 1997),
  • paper QWC4

Characterization of anodic oxide growth kinetics on (100) Si by surface second-harmonic generation

S. Janz and J. A. Bardweil

Not Accessible

Your library or personal account may give you access

Abstract

Anodic oxidation is a simple technique for producing Si02 films on Si at room temperature,1 which also has unique applications for dopant delineation2 and dopant depth profiling.3 Because of the inaccessability of the Si/SiO2/electrolyte interfaces, optical secondharmonic (SH) generation is one of the few techniques capable of monitoring anodic oxidation in situ and in real time.4

© 1997 Optical Society of America

PDF Article
More Like This
In situ optical second harmonic monitoring of hydrogen adsorption and desorption kinetics during epitaxial growth on Si (001)

X. F. Hu, Z. Xu, P. S. Parkinson, D. Lim, J. G. Ekerdt, and M. C. Downer
CFG4 Conference on Lasers and Electro-Optics (CLEO:S&I) 1997

Interface second-harmonic E1 and E1 + Δ1 interband resonances at the GaAs/oxide interface

S. Janz and Z. H. Lu
QWC5 Quantum Electronics and Laser Science Conference (CLEO:FS) 1997

Second harmonic azimuthal anisotropy spectroscopy and doping dependence at hydrogen-covered Si(OO1) surfaces

Z. Xu, X. F. Hu, J. G. Ekerdt, and M. C. Downer
QWC1 Quantum Electronics and Laser Science Conference (CLEO:FS) 1997

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use