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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2005),
  • paper QTuK4

High Resolution Subsurface Thermal Imaging using a Numerical Aperture Increasing Lens

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Abstract

We investigate the experimental limitations of the maximum resolution that can be achieved in far-field subsurface thermal imaging with a numerical aperture increasing lens. High-resolution thermal imaging has applications in failure analysis of Si integrated circuits.

© 2005 Optical Society of America

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