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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest (CD) (Optica Publishing Group, 2007),
  • paper QFC2

Nano-Optics for Chemical and Materials Characterization

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Abstract

We have developed a hybrid microscope which combines structured-illumination techniques with Raman-spectroscopy to record 100 nm resolution images with chemically-specific contrast. We will show images of semiconductor nanostructures and discuss the technique's advantages and requirements.

© 2007 Optical Society of America

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