Monolithically integrated membrane-in-the-middle cavity optomechanical systems

Graham J. Hornig; Lintong Bu; Ray G. DeCorby

doi:10.1364/QUANTUM.2020.QW6A.2

OSA Quantum 2.0 Conference
OSA Technical Digest (Optica Publishing Group, 2020),
paper QW6A.2
•https://doi.org/10.1364/QUANTUM.2020.QW6A.2

Monolithically integrated membrane-in-the-middle cavity optomechanical systems

Graham J. Hornig, Lintong Bu, and Ray G. DeCorby

Quantum 2.0 2020

Washington, DC United States
14–17 September 2020
ISBN: 978-1-943580-81-1

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Quantum Poster Session IIA (QW6A)

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G. J. Hornig, L. Bu, and R. G. DeCorby, "Monolithically integrated membrane-in-the-middle cavity optomechanical systems," in OSA Quantum 2.0 Conference, M. Raymer, C. Monroe, and R. Holzwarth, eds., OSA Technical Digest (Optica Publishing Group, 2020), paper QW6A.2.

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Abstract

We describe a monolithic surface-micromachining process for embedding silicon nitride membranes inside Fabry-Perot cavities on a chip. Preliminary measurements of the mechanical resonance spectra are in good agreement with theoretical predictions.

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