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Using Instrumented Indentation For Subsurface Damage Measurements

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Abstract

Even unusual care in polishing, leads to optics with somewhat damaged faces. The question is to what degree? We will show instrumented indentation is a versatile, quick way to give an answer. Limited power, detail size, or durability are accepted hazards of subsurface damage. Its form varies: ductile materials damage by hardening, and brittle ones have fractured surfaces.

© 1990 Optical Society of America

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