Investigation of Polished Optical Glasses with a MAI—MWL Ellipsometer Arrangement

Michael Linder

doi:10.1364/SCIOF.1990.SMC5

Science of Optical Finishing
Technical Digest Series (Optica Publishing Group, 1990),
paper SMC5
•https://doi.org/10.1364/SCIOF.1990.SMC5

Investigation of Polished Optical Glasses with a MAI—MWL Ellipsometer Arrangement

Michael Linder

Science of Optical Finishing 1990

Monterey, California United States
10–12 June 1990
ISBN:

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M. Linder, "Investigation of Polished Optical Glasses with a MAI—MWL Ellipsometer Arrangement," in Science of Optical Finishing, Technical Digest Series (Optica Publishing Group, 1990), paper SMC5.

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Abstract

Surface layers are investigated by means of MAI–MWL (multiple angle of incidence, multiple wavelength) ellipsometry. The "layers" investigated are modifications of optical glasses in the near-surface region, caused by polishing and cleaning processes. The influence of several treatments on different materials is discussed.

The device used is a new, special ellipsometer arrangement using only absolutely nescessary elements but allowing fast and very accurate measurements.

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