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The Application of Scanning Microscopies to Optical Materials

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Abstract

The paper has two parts: 1) an overview of various techniques of scanning microscopy and their relevance to optics; and 2) a discussion of an instrument under development for measuring the finish of optical surfaces with a range of 200 × 200 μm and a lateral resolution of ~ 1 nm.

© 1990 Optical Society of America

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