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Conferences > SELED > 2023 > JTu4A > JTu4A.15

High-density indium phosphide SOA arrays with < 30 µm pitch

Sander F.G. Reniers, W. Pim Voorthuijzen, Martijn J.R. Heck, and Yuqing Jiao

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Abstract

For the first time, we present an approach towards fabricating high-density semiconductor optical amplifier arrays, which reduces the pitch below 30 µm. Both fabrication and thermal challenges of this approach are evaluated.

© 2023 The Author(s)

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