A Novel Thin-Mirror Trench-Fill Technique for the Manufacture of High Optical Quality LCoS Spatial Light Modulators

K. Seunarine; D. W. Calton; I. Underwood

doi:10.1364/SLM.1999.PD3

Spatial Light Modulators and Intgrated Optoelectronic Arrays
OSA Technical Digest (Optica Publishing Group, 1999),
paper PD3
•https://doi.org/10.1364/SLM.1999.PD3

A Novel Thin-Mirror Trench-Fill Technique for the Manufacture of High Optical Quality LCoS Spatial Light Modulators

K. Seunarine, D. W. Calton, and I. Underwood

Spatial Light Modulators and Integrated Optoelectronic Arrays 1999

Aspen, Colorado United States
ISBN: 1-55752-602-8

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K. Seunarine, D. W. Calton, and I. Underwood, "A Novel Thin-Mirror Trench-Fill Technique for the Manufacture of High Optical Quality LCoS Spatial Light Modulators," in Spatial Light Modulators and Intgrated Optoelectronic Arrays, OSA Technical Digest (Optica Publishing Group, 1999), paper PD3.

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Abstract

The manufacture of high quality liquid crystal over silicon (LCoS) SLM’s, has recently begun to show commercial viability.

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