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Development of a spatial light modulator - a randomly addressed liquid-crystal-over-nMOS array.

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Abstract

Following the successful fabrication of a prototype liquid crystal over silicon spatial light modulator 1,2), a more advanced version having a larger number of pixels with smaller dimensions is being developed. To provide an indication of the progress being made towards the realisation of higher performance devices, details relating to the prototype are included in parentheses in the description of the new active silicon backplane. As described below the prototype has also been used as a test-bed for optimising the performance of the light modulating layer for the new device.

© 1988 Optical Society of America

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