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Integrated VCSELs, MSM Photodetectors, and GaAs MESFETs for Low Cost Optical Interconnects

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Abstract

Vertical Cavity Surface Emitting Lasers (VCSELs) and Metal-Semiconductor-Metal (MSM) photodetectors are two key components for high speed optical data communication and optical interconnect modules. In this paper we report a successful integration of VCSELs and MSM photodetectors and GaAs MESFETs on semi-insulating (S.I.) substrate.

© 1997 Optical Society of America

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