Abstract

Since the evolution of the ferroelectric liquid crystal (FLC) on silicon spatial light modulator (SLM)¹, there have been improvements in resolution, speed and optical quality²,³. The SLM we are presenting here contains improvements to all these factors as well as improvements on fill factor, liquid crystal dynamics and fabrication techniques. The SLM has 320x240 pixels on a 34μm pitch and fits onto a 14mm square die. The silicon was designed for maximum fill factor as well as high speed operation with a suitable high speed FLC. To this end it is addressed using a 64 bit bus and the integrated circuitry includes facilities for a number of addressing schemes.

© 1997 Optical Society of America