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Enhancement of Light Extraction in a Light-emitting Diode by Fabricating Surface Gratings with Photoelectrochemical Wet Etching

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Abstract

The >43% enhancement of light extraction by fabricating a surface grating structure around the mesa of a light-emitting diode with an approach combining photoelectrochemical wet etching and phase mask interferometry is demonstrated.

© 2010 Optical Society of America

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