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Conferences > SOLED > 2012 > LM4A > LM4A.4

Synthesis of Transparent Conductive Thin Films of In2O3 and SnO2 by DC Magnetron Sputtering

A. Bedoya-Calle, A. Torres-Castro, M. García-Méndez, and U. Ortiz-Mendez

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Abstract

Study of optical and microestructural properties in In2O3 and SnO2 multilayer thin films synthesis by DC magnetron sputtering characterized with SEM, X-RD and four point probe resistivity where is possible appreciate an enhancement in conductivity.

© 2012 Optical Society of America

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