X-ray Photoemission Spectroscopy Studies of Indium-tin-oxide Films Treated by Oxygen Plasma Immersion Ion Implantation

Long He; Xiaoxuan Fan; Qiongrong Ou; Qiongrong Ou; Rongqing Liang; Rongqing Liang

doi:10.1364/SOLED.2012.LM4A.5

Renewable Energy and the Environment Optics and Photonics Congress
OSA Technical Digest (online) (Optica Publishing Group, 2012),
paper LM4A.5
•https://doi.org/10.1364/SOLED.2012.LM4A.5

X-ray Photoemission Spectroscopy Studies of Indium-tin-oxide Films Treated by Oxygen Plasma Immersion Ion Implantation

Long He, Xiaoxuan Fan, Qiongrong Ou, and Rongqing Liang

Solid-State and Organic Lighting 2012

Eindhoven Netherlands
11–14 November 2012
ISBN: 978-1-55752-952-7

From the session
Transparent Conductor & Packaging (LM4A)

Open Access

Get PDF
Email
Share
Get Citation
Copy Citation Text
L. He, X. Fan, Q. Ou, and R. Liang, "X-ray Photoemission Spectroscopy Studies of Indium-tin-oxide Films Treated by Oxygen Plasma Immersion Ion Implantation," in Renewable Energy and the Environment Optics and Photonics Congress, OSA Technical Digest (online) (Optica Publishing Group, 2012), paper LM4A.5.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

Oxygen plasma immersion ion implantation (PIII) was introduced to modify indium-tin-oxide (ITO) films. X-ray photoemission spectroscopy (XPS) was employed to characterize the elements ratio and core level spectra of O1s at the surface of ITO.

PDF Article

More Like This

Surface Treatment of Indium-tin-oxide Films via Plasma Immersion Ion Implantation

Rongqing Liang, Qiongrong Ou, and Long He
LM4A.3 Solid-State and Organic Lighting (SOLED) 2012

Surface Modification by Plasmas: X-ray Photoemission Studies

J. H. Thomas
WA1 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1989

Low temperature deposition of indium tin oxide films by plasma ion-assisted evaporation

K. Füchsel, U. Schulz, and N. Kaiser
ThB3 Optical Interference Coatings (OIC) 2007

Previous Article Next Article