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Characterizing Fano Resonances from Si Photonic Crystal Slab Using Out-of-plane Light Coupling Arrangement

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Abstract

Fano resonance is analyzed from a Si photonic crystal slab fabricated by EBL. The measured reflection / transmission spectra being in good agreement with simulated results provide convincing proof to this versatile out-of-plane measurement technique.

© 2017 Optical Society of America

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