Scanning Soft X-Ray Microscopy at the National Synchrotron Light Source

C. Jacobsen; J. Kirz; I. McNulty; R. J. Rosser; C. Buckley; R. E. Burge; M. T. Browne; R. Cave; P. Charalambous; P. J. Duke; J. M. Kenney; A. B. Michette; B. Morrison; F. Cinotti; H. Rarback; J. Pine

doi:10.1364/SWCR.1986.MC3

Topical Meeting on Short Wavelength Radiation: Generation and Applications
Technical Digest Series (Optica Publishing Group, 1986),
paper MC3
•https://doi.org/10.1364/SWCR.1986.MC3

Scanning Soft X-Ray Microscopy at the National Synchrotron Light Source

C. Jacobsen, J. Kirz, I. McNulty, R. J. Rosser, C. Buckley, R. E. Burge, M. T. Browne, R. Cave, P. Charalambous, P. J. Duke, J. M. Kenney, A. B. Michette, B. Morrison, F. Cinotti, H. Rarback, and J. Pine

Short Wavelength Coherent Radiation: Generation and Applications 1986

Monterey, California United States
24–26 March 1986
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C. Jacobsen, J. Kirz, I. McNulty, R. J. Rosser, C. Buckley, R. E. Burge, M. T. Browne, R. Cave, P. Charalambous, P. J. Duke, J. M. Kenney, A. B. Michette, B. Morrison, F. Cinotti, H. Rarback, and J. Pine, "Scanning Soft X-Ray Microscopy at the National Synchrotron Light Source," in Topical Meeting on Short Wavelength Radiation: Generation and Applications, Technical Digest Series (Optica Publishing Group, 1986), paper MC3.

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Abstract

In scanning soft X-ray microscopy a quantitative map of specimen absorptivity is obtained. Sharp changes in the spectrum at absorption edges provide contrast and are the basis for elemental analysis by comparison of images taken at differing wavelengths. We have developed an instrument that uses monochromatized synchrotron radiation as its source. A collimated portion of this source is focused with a Fresnel zone plate to a submicron spot, across which the specimen is scanned under computer control.

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