First Images from the Stanford Tabletop Scanning Soft X-Ray Microscope

J. A. Trail; R. L. Byer

doi:10.1364/SWCR.1988.MH290

Short Wavelength Coherent Radiation: Generation and Applications
Technical Digest Series (Optica Publishing Group, 1988),
paper MH290
•https://doi.org/10.1364/SWCR.1988.MH290

First Images from the Stanford Tabletop Scanning Soft X-Ray Microscope

J. A. Trail and R. L. Byer

Short Wavelength Coherent Radiation: Generation and Applications 1988

North Falmouth, MA United States
26–29 September 1988
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Microscopy and Holography (MH)

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J. A. Trail and R. L. Byer, "First Images from the Stanford Tabletop Scanning Soft X-Ray Microscope," in Short Wavelength Coherent Radiation: Generation and Applications, Technical Digest Series (Optica Publishing Group, 1988), paper MH290.

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Abstract

We have constructed a scanning soft x-ray microscope which uses a laser-produced plasma as the soft x-ray source and normal incidence multilayer coated mirrors in a Schwarzschild configuration as the focusing optics. The microscope operates at a wavelength of 140 Å, has a spatial resolution of 0.5 μm, and has a soft x-ray photon flux through the focus of 10⁴ s^-1 when operated with only 170 mW of average laser power. The microscope is compact; the complete system, including the laser, fits on a single optical table. In this paper we describe the microscope and present images of metallic microstructures.

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