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Recent Progress of Terawatt Excimer Laser Sources

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Abstract

Subpicosecond pulses first in the visible and more recently at 193 nm have been amplified in an electron- beam excited XeF(C→A) and ArF(B→X) excimer laser amplifier to pulse energies in the hundred millijoule range. Details of the current experimental program and future prospects will be described.

© 1993 Optical Society of America

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