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Conferences > SXRAY > 1992 > TuA > TuA2

Condenser Optics, Partial Coherence and Imaging for Soft X-Ray Projection Lithographapy

Gary E. Sommargren and Lynn G. Seppala

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Abstract

In this paper we have concentrated on the design and implications of condenser systems for an all reflective soft x-ray projection system. The optical system for a soft x-ray projection lithography system has five main components: the source, condenser (illumination system), mask, imaging system and wafer.

© 1992 Optical Society of America

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