Tolerances of a Reflective Imaging System

Masaaki Itou; Tsuneo Terasawa

doi:10.1364/SXRAY.1992.TuA5

Soft-X-Ray Projection Lithography
Technical Digest Series (Optica Publishing Group, 1992),
paper TuA5
•https://doi.org/10.1364/SXRAY.1992.TuA5

Tolerances of a Reflective Imaging System

Masaaki Itou and Tsuneo Terasawa

Soft X-Ray Projection Lithography 1992

Monterey, California United States
6–8 April 1992
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Optics (TuA)

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M. Itou and T. Terasawa, "Tolerances of a Reflective Imaging System," in Soft-X-Ray Projection Lithography, Technical Digest Series (Optica Publishing Group, 1992), paper TuA5.

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Abstract

A number of reflective imaging systems have been designed for use in soft X-ray projection lithography.^1,2 Optical surface figure errors in these imaging systems, however, degrade resolution as well as cause changes in image positions, which in turn degrade overlay accuracy. We therefore evaluate the figure tolerances of a four-mirror imaging system by ray-tracing calculations.

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