Precision bending of substrate for high perfomance x-ray optics

D.D. Allred; Y. Shi; M. Berrondo; R.T. Perkins; F. Yuan; L.V. Knight; A. Reyes-Mena

doi:10.1364/SXRAY.1992.TuA7

Soft-X-Ray Projection Lithography
Technical Digest Series (Optica Publishing Group, 1992),
paper TuA7
•https://doi.org/10.1364/SXRAY.1992.TuA7

Precision bending of substrate for high perfomance x-ray optics

D.D. Allred, Y. Shi, M. Berrondo, R.T. Perkins, F. Yuan, L.V. Knight, and A. Reyes-Mena

Soft X-Ray Projection Lithography 1992

Monterey, California United States
6–8 April 1992
ISBN:

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Optics (TuA)

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D. D. Allred, Y. Shi, M. Berrondo, R. T. Perkins, F. Yuan, L. V. Knight, and A. Reyes-Mena, "Precision bending of substrate for high perfomance x-ray optics," in Soft-X-Ray Projection Lithography, Technical Digest Series (Optica Publishing Group, 1992), paper TuA7.

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Abstract

We have investigated producing aspheric mirrors for x rays with order-of-magnitude improvements in surface finish, figure, and lightness for x-ray mirror blanks.

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