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Multilayer Performance for Soft X-ray Schwarzchild Optics

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Abstract

One of the most important requirements for soft x-ray optics is high normal incidence reflectivity. But to ensure a high throughput optical system, Schwarzchild objectives in particular, it is not only necessary to fabricate multilayer coatings with the highest possible reflectivity but to achieve the designed d-spacing uniformity/grading and match the d-spacings of the concave and convex mirrors. The latter is especially important for high throughput multi-mirror lithography optical schemes.[1]

© 1992 Optical Society of America

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