Multilayer Damage and Repair Issues in Soft-X-Ray Projection Lithography

D. P. Gaines; R. C. Spitzer; N. M. Ceglio

doi:10.1364/SXRAY.1992.TuB5

Soft-X-Ray Projection Lithography
Technical Digest Series (Optica Publishing Group, 1992),
paper TuB5
•https://doi.org/10.1364/SXRAY.1992.TuB5

Multilayer Damage and Repair Issues in Soft-X-Ray Projection Lithography

D. P. Gaines, R. C. Spitzer, and N. M. Ceglio

Soft X-Ray Projection Lithography 1992

Monterey, California United States
6–8 April 1992
ISBN:

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Multilayers (TuB)

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D. P. Gaines, R. C. Spitzer, and N. M. Ceglio, "Multilayer Damage and Repair Issues in Soft-X-Ray Projection Lithography," in Soft-X-Ray Projection Lithography, Technical Digest Series (Optica Publishing Group, 1992), paper TuB5.

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Abstract

Current soft x-ray projection lithography (SXPL) system designs require multilayer coated optics to operate at levels approaching predicted maximums for near normal incidence reflectivity. Effects that (potentially) degrade multilayer performance in the SXPL environment are discussed. Appropriate repair strategies are suggested, and preliminary results are presented.

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