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Conferences > SXRAY > 1992 > TuB > TuB7

Investigation of Distortion and Damage of Mo-Si Multilayer Reflective Coatings with High Intensity UV Radiation

Howard A. Bender, William T. Silfvast, and Kenneth M. Beck

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Abstract

We report on studies of optical distortion and damage thresholds of Mo-Si multilayer soft x-ray reflective coatings using 308 nm pulsed radiation from a XeCl excimer laser to simulate soft x-ray irradiation. Preliminary experimental results yielded values of 260 mJ/cm2 and 500 mJ/cm2 for distortion and damage thresholds.

© 1992 Optical Society of America

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