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Conferences > SXRAY > 1992 > WB > WB1

Characterization and Control of Laser Plasma Flux Parameters for Soft-X-Ray Projection Lithography

Martin C. Richardson and William T. Silfvast

Open Access Open Access

Abstract

We discuss particle and plasma emission measurements of, and particle interdiction techniques for, laser plasma sources designed to meet the needs of soft-x-ray projection lithography.

© 1992 Optical Society of America

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