Abstract

A projection x-ray lithography system requires a laser system with output of approximately 1 J/pulse, 2 to 3 ns pulselength and a repetition rate of 400 Hz. We have designed a laser diode pumped Nd:YLF rod laser system meeting these requirements. It consists of a power oscillator running at 0.5 J/pulse and 20 ns pulselength followed by a 2x power amplifier. The output pulse is shortened to 2.5 ns by an SBS pulse compressor. We discuss the detailed design criteria for the laser and the experiments which support the design.

© 1992 Optical Society of America