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Conferences > Sensors > 2010 > SWD > SWD6

Low-Coherence Interferometry Optical Sensor for the Characterization of Deposited Thin Film

Silvia Fabiani, Marco Farina, Andrea Di Donato, Agnese Lucesoli, and Tullio Rozzi

Open Access Open Access

Abstract

Non-destructive sensor for the measurement of thickness and refractive index of polymeric layers deposit on glass bases. The sensor is oriented to the manufacture of polymers for O-PCB interconnects. Michelson FOLCI configuration has been applied. Article not available.

© 2010 Optical Society of America

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