Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Guided Mode Resonance Sensors for the Monitoring of Film Growth in Atomic Layer Deposition

Not Accessible

Your library or personal account may give you access

Abstract

Guided mode resonance optics consisting of linear gratings are highly sensitive optical sensors. Their use for monitoring the film growth during atomic layer deposition will be discussed based on rigorous coupled wave approach calculations.

© 2011 Optical Society of America

PDF Article
More Like This
Atomic Layer Deposition-an alternative to the deposition of optical coatings?

Mikko Ritala and Markku Leskelä
MB1 Optical Interference Coatings (OIC) 2004

Selected Applications of Atomic Layer Deposition Dielectric Nanolaminates as Functional Optical Coatings

Adriana Szeghalmi, Michael Helgert, Robert Brunner, Mario Bretschneider, Stephan Senz, Ulrich Gösele, and Mato Knez
AThB3 Advances in Optical Materials (AIOM) 2009

Guided-Mode Resonance Biochemical Sensor Technology

Robert Magnusson, Debra Wawro, and Yiwu Ding
FTuY1 Frontiers in Optics (FiO) 2009

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved