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Conferences > Sensors > 2013 > SW4B > SW4B.5

Parametric excitation of silicon-on-insulator microcantilever beams by fringing fields probed with laser Doppler vibrometery

Yoav Linzon, Said Mahajna, Bojan Ilic, and Slava Krylov

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Abstract

Large amplitude flexural vibrations were excited in single layer silicon-on-insulator micromechanical cantilever beams in ambient air, driven by symmetrical actuating electrodes around grounded cantilevers and characterized optically with a laser Doppler vibrometer under ambient conditions.

© 2013 Optical Society of America

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