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Flexible Mid-infrared Aluminium Nitride Waveguides for Real-time and Label-Free Chemical Sensing

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Abstract

Chip-scale chemical sensors were demonstrated using mid-Infrared aluminum nitride waveguides and flexible substrates. Real-time detection of ethanol and water was conducted by measuring waveguide light at λ=2.7 μm corresponding to characteristic -OH absorption.

© 2017 Optical Society of America

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