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Waveguide-Based Multi-Band Mid-IR Absorption Spectroscopy on Water-Containing Biofuel

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Abstract

Silicon waveguide structures with SiO2 cladding and tapered on-chip couplers are fabricated on Si wafers for use in water-containing biofuel composition measurement in the 2.4–2.6 μm respectively 3.5–3.8 μm water and ethanol dominated absorption bands.

© 2018 The Author(s)

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