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Design and fabrication of Ge-on-Si slot waveguide for mid- infrared optical gas sensor

Jinha Lim, Joonsup Shim, and SangHyeon Kim

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Abstract

Optical slot waveguide was demonstrated in the mid-infrared at 4.2 μm for gas sensing application on Germanium-on-silicon platform. 0.47 ppm of limit-of-detection for carbon dioxide can be achieved with enhanced confinement factor and propagation loss.

© 2021 The Author(s)

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