Investigation on TiOx/Ti/TiOx tri-layer film for integrated optical gas sensing applications

Joonsup Shim; Jinha Lim; SangHyeon Kim

doi:10.1364/SENSORS.2021.SF2D.3

OSA Optical Sensors and Sensing Congress 2021 (AIS, FTS, HISE, SENSORS, ES)
OSA Technical Digest (Optica Publishing Group, 2021),
paper SF2D.3
•https://doi.org/10.1364/SENSORS.2021.SF2D.3

Investigation on TiO_x/Ti/TiO_x tri-layer film for integrated optical gas sensing applications

Joonsup Shim, Jinha Lim, and SangHyeon Kim

Optical Sensors 2021

Washington, DC United States
19–23 July 2021
ISBN: 978-1-943580-90-3

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Waveguide and Photonic Chemical Sensors (SF2D)

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J. Shim, J. Lim, and S. Kim, "Investigation on TiOx/Ti/TiOx tri-layer film for integrated optical gas sensing applications," in OSA Optical Sensors and Sensing Congress 2021 (AIS, FTS, HISE, SENSORS, ES), S. Buckley, F. Vanier, S. Shi, K. Walker, I. Coddington, S. Paine, K. Lok Chan, W. Moses, S. Qian, P. Pellegrino, F. Vollmer, G. , J. Jágerská, R. Menzies, L. Emmenegger, and J. Westberg, eds., OSA Technical Digest (Optica Publishing Group, 2021), paper SF2D.3.

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Abstract

We systematically investigated the electrical characteristics of TiO_x/Ti/TiO_x tri-layer film for optical gas sensors on Ge-on-insulator platform. It was found that noise-equivalent- temperature-difference, which is strongly associated with limit-of-detection of gas sensors, could reach 14.56 mK.

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