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Conferences > Sensors > 2022 > SM4E > SM4E.1

Thin-film Wafer-Scale Mid-IR Fabry Perot Cavity Gas Sensor

Pavithra Rao, Akshay Keloth, and Shankar Kumar Selvaraja

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Abstract

We demonstrate a miniaturized wafer-scale optical gas sensor that combines the gas cell, an optical filter, and integrated flow channels. Using the module, we demonstrate absorption sensing of ethylene down to 100 ppm-level.

© 2022 The Author(s)

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