Laser mask micromachining system based on beam-scanning widening technique

Ji-jiang XIE; Fei GAO; Fei GAO; Qi-kun PAN; Qi-kun PAN; Gui-long YANG; Chun-lei SHAO; Lai-ming ZHANG; Jing GUO

doi:10.1364/SUMSESSION.2011.Tu23

International Summer Session: Lasers and Their Applications
(Optica Publishing Group, 2011),
paper Tu23
•https://doi.org/10.1364/SUMSESSION.2011.Tu23

Laser mask micromachining system based on beam-scanning widening technique

Ji-jiang XIE, Fei GAO, Qi-kun PAN, Gui-long YANG, Chun-lei SHAO, Lai-ming ZHANG, and Jing GUO

CIOMP-OSA Summer Session: Lasers and Their Applications 2011

Changchun China
31 July–5 August 2011
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J. XIE, F. GAO, Q. PAN, G. YANG, C. SHAO, L. ZHANG, and J. GUO, "Laser mask micromachining system based on beam-scanning widening technique," in International Summer Session: Lasers and Their Applications, (Optica Publishing Group, 2011), paper Tu23.

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Abstract

A laser mask micromachining system is developed based on Nd:KGW laser, beam-scanning widening technique and mask micro-imaging method, which can be applied to micro-marking, engraving and forming of miniature workpieces.

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