The ablation of CuMn alloy using nanosecond laser (7ns pulse duration at the wave length of 532nm) and femtosecond laser (90fs pulse duration at 400nm) is reported. It is found that the roughness increases with the increase of the laser power and the reduction of frequency, scanning speed, the spacing and the melting point of the alloy. The various morphologies caused by the nanosecond and femtosecond laser are attributed to different removal mechanisms. By adopting optimized parameters, the micro scale pillars and pits were fabricated from the polished Cu-Mn alloy, with the sectional diameter of about 50 m, the spacing of about 60 m and the height of about 120 m.

© 2011 Optical Society of America

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