Abstract
Recently, a fast and high accurate algorithm to obtain the MRF’s dwell time inherited from CCOS for large mirror is developed. For diameter 500mm circle mirror whose matrix dimension is up to 182 462 × 189 210, it just takes about 83 seconds to get dwell time with the RMS of the surface error from 0.461λ to 0.017λ (λ = 632.8nm).
© 2013 Optical Society of America
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