Abstract
Using substrate transfer processes, we have fabricated heterojunction bipolar transistors with submicron emitter- base and collector-base junctions, minimizing RC parasitics and increasing fmax to 500 GHz. The process also provides a microstrip wiring environment on a low- ϵr dielectric substrate. Demonstrated small-scale ICs in the process include lumped and distributedamplifiers with bandwidths to 85 GHz, 48 GHz static frequency dividers, and 50GHz AGC / limiting amplifiers.
© 1999 Optical Society of America
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