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Integrated-Circuit Diagnostics Using Micromachined Photoconductive-Sampling Probes

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Abstract

A high-impedance, fiber-mounted, photoconductive-sampling probe is utilized for performing calibration-free, absolute-voltage electrical measurements at internal nodes of high-speed digital and analog integrated circuits. The photoconductive sampling probe is thus found to be a valuable tool for circuit diagnostics, failure analysis, and model validation.

© 1999 Optical Society of America

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