Abstract
In III-V semiconductors, comparison of femtosecond time scale optical measurements1 with microscopic carrier dynamic theory2 has become direct and quantitative. In Column IV semiconductors, on the other hand, quantitative experiment-theory comparison has been achieved only on a picosecond time scale.3 This paper presents a systematic study of the fs.-time-resolved ellipsometric response of epitaxial Si1.xGex (0≤x≤l) alloys as a first step in measuring and modelling subpicosecond bulk carrier dynamics. Pump and probe beams were derived from either an unamplified CPM laser4 (620 nm wavelength) or an unamplified KLM laser(800nm + 400nm second harmonic). The time-dependent optical response is related to free carrier density Neh(t), reduced effective mass μ*(t) via a time-varying Drude-Lorentz dielectric function:
© 1994 Optical Society of America
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