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Conferences > UP > 2002 > TuE > TuE38

Sub-micrometer pulsetrain machining of diamond-like amorphous carbon films with a femtosecond pulse Ti:sapphire laser oscillator

S. Lakó, P. Apai, I. Pócsik, R. Szipcs, and E. Wintner

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Abstract

Sub-micrometer holes on diamond-like amorphous carbon coatings on Si wafers were produced by ablation with femtosecond pulses. In contrast to earlier experiments with metallic coatings, even the damaged area does not exceed the sub-micrometer size.

© 2002 Optical Society of America

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