Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > UP > 2004 > ME > ME5
  • 14th International Conference on Ultrafast Phenomena
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper ME5

Micrometer and sub-micrometer structures fabrication and analysis with femtosecond laser micro-nanomachining system

Egidijus Vanagas, Jouji Kawai, Dmitri Tuzhilin, Hirofumi Musasa, Pavel Rutkovski, Igor Kudryashov, and Shoji Suruga

Not Accessible

Your library or personal account may give you access

Abstract

A concept of modular laser processing system, which can be flexibly optimized for processing by femtosecond laser pulses, is presented. The system capabilities and fabricated structures are demonstrated.

© 2004 Optical Society of America

PDF Article
More Like This
Sub-micrometer structuring of metals with femtosecond laser pulses

S. Nolte, M. Will, M. Cumme, B.N. Chichkov, A. Tünnermann, F. Korte, and A. Egbert
CFG2 Conference on Lasers and Electro-Optics (CLEO:S&I) 2001

Exploring the deterministic nature of femtosecond laser-induced optical breakdown and applications to nanomachining

Alan J. Hunt, Ajit Joglekar, Edgar Meyhöfer, Hsiao-hua Liu, and Gerard Mourou
CMY1 Conference on Lasers and Electro-Optics (CLEO:S&I) 2004

Sub-wavelength surface structures on silicon irradiated by femtosecond laser pulses

T. H. R. Crawford, A. Borowiec, and H. K. Haugen
CTuP40 Conference on Lasers and Electro-Optics (CLEO:S&I) 2004

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use