Abstract

Oxygen is a gas essential to human life and industrial processes. Here, we developed a highly sensitive oxygen gas sensor based on deep ultraviolet absorption spectroscopy between 180 and 200 nm. The implemented method relies on differential absorption spectra extracted from the obtained high-resolution absorption spectra. The detection capability was greatly improved (six-fold) by eliminating air from the open optical path, achieved by purging the entire system with pure nitrogen. A linear relationship was obtained between the optical parameter and the oxygen concentration with a slope of 0.107 and determination coefficient of 0.999. A detection limit of 24 ppm per meter was determined with a response time of 25 s. Good repeatability (${\rm{standard}}\;{\rm{deviation}} = {{16}}\;{\rm{ppm}}$) and stability were confirmed. We demonstrated that this system can detect ppm oxygen levels with high sensitivity and low uncertainty.

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