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Active photonic integrated circuits combining Si3N4 microresonators with 2D materials for applications in the visible wavelength range

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We present air-cladded silicon nitride microresonators at visible wavelengths compatible with 2D material transfer, fabricated using the photonic Damascene reflow process. Quality factors of 1 million have been measured at 765 nm.

© 2018 The Author(s)

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