Abstract
We demonstrate a compact interferometric lithography nanopatterning tool based on an amplitude division interferometer (ADI) and a wavelength desktop size capillary discharge laser. The system is designed to print arrays of lines, holes, and dots with sizes below on high resolution photoresists for the fabrication of arrays of nanostructures with physical and biological applications. The future combination of this ADI with high repetition rate tabletop lasers operating at shorter wavelengths should allow the printing of arrays of sub- size features with a tabletop setup.
© 2008 Optical Society of America
Full Article | PDF ArticleMore Like This
P. W. Wachulak, M. G. Capeluto, M. C. Marconi, C. S. Menoni, and J. J. Rocca
Opt. Express 15(6) 3465-3469 (2007)
Artak Isoyan, A. Wüest, John Wallace, Fan Jiang, and Franco Cerrina
Opt. Express 16(12) 9106-9111 (2008)
Wei Li and Mario C. Marconi
Opt. Express 23(20) 25532-25538 (2015)